Modeling, optimization and control of spatial uniformity in manufacturing processes
نویسندگان
چکیده
منابع مشابه
Software Prototype for Optimization and Control of Manufacturing Processes
Modeling of manufacturing processes aimed at better understanding, optimization and process control is very important in manufacturing practice. This is usually achieved by integrating empirical models with classical mathematical and meta-heuristic algorithms. In this paper, software prototype “Function Analyzer” for optimization and control of manufacturing processes is presented. It is based ...
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ژورنال
عنوان ژورنال: IEEE Transactions on Semiconductor Manufacturing
سال: 1993
ISSN: 0894-6507
DOI: 10.1109/66.210657